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Pressure
Freescale Semiconductor Media Resistant and High Temperature Accuracy Integrated Silicon Pressure Sensor for Measuring Absolute Pressure, On-Chip Signal Conditioned, Temperature Compensated and Calibrated
The MPXHZ6130A series sensor integrates on-chip, bipolar op amp circuitry and thin film resistor networks to provide a high output signal and temperature compensation. The sensor's packaging has been designed to provide resistance to high humidity conditions as well as common automotive media. The small form factor and high reliability of on-chip integration make the Freescale Semiconductor, Inc. pressure sensor a logical and economical choice for the system designer. The MPXHZ6130A series piezoresistive transducer is a state-of-the-art, monolithic, signal conditioned, silicon pressure sensor. This sensor combines advanced micromachining techniques, thin film metallization, and bipolar semiconductor processing to provide an accurate, high level analog output signal that is proportional to applied pressure.
MPXHZ6130A Rev 1, 05/2010
MPXHZ6130A Series
15 to 130 kPa (2.2 to 18.9 psi) 0.2 to 4.8 V Output
Application Examples
* Aviation Altimeters * Industrial Controls * Engine Control/Manifold Absolute Pressure (MAP) * Weather Stations and Weather Reporting Devices
Features
* * * * * * 1.5% Maximum Error Over 0 to 85C Resistant to High Humidity and Common Automotive Media Improved Accuracy at High Temperature Ideally suited for Microprocessor or Microcontroller-Based Systems Temperature Compensated from -40 to +125C Durable Thermoplastic (PPS) Surface Mount Package ORDERING INFORMATION
Package Case Device Name Options No. Super Small Outline Package (MPXHZ6130A Series) MPXHZ6130A6U Rail 1317 MPXHZ6130AC6U Rail 1317A None # of Ports Single Dual Gauge Pressure Type Differential Absolute Device Marking MPXHZ6130A MPXHZ6130A
* *
* *
SUPER SMALL OUTLINE PACKAGES
MPXHZ6130A6U CASE 1317
MPXHZ6130AC6U CASE 1317A
(c) Freescale Semiconductor, Inc., 2006-2010. All rights reserved.
Pressure
Operating Characteristics
Table 1. Operating Characteristics (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2.
Characteristic Pressure Range Supply Voltage(1) Supply Current Minimum Pressure Offset(2) @ VS = 5.0 Volts Full Scale Output(3) @ VS = 5.0 Volts Full Scale Span(4) @ VS = 5.0 Volts Accuracy(5) Sensitivity Response Time(6) Warm-Up Time(7) Offset Stability(8) 1. Device is ratiometric within this specified excitation range. 2. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 3. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 4. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 5. Accuracy is the deviation in actual output from nominal output over the entire pressure range and temperature range as a percent of span at 25C due to all sources of error including the following: Linearity: Temperature Hysteresis: Pressure Hysteresis: TcSpan: TcOffset: Output deviation from a straight line relationship with pressure over the specified pressure range. Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. Output deviation over the temperature range of 0 to 85C, relative to 25C. Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. (0 to 85C) Symbol POP VS Io Voff Min 15 4.75 -- 0.132 Typ -- 5.0 6.0 0.200 Max 130 5.25 10 0.268 Unit kPa Vdc mAdc Vdc
(0 to 85C)
VFSO
4.632
4.700
4.768
Vdc
(0 to 85C)
VFSS
4.365
4.500
4.635
Vdc
(0 to 85C)
-- V/P tR -- --
-- -- -- -- --
-- 39.2 1.0 20 0.25
1.5 -- -- -- --
%VFSS mV/kPa ms ms %VFSS
6. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 7. Warm-up Time is defined as the time required for the product to meet the specified output voltage after the pressure has been stabilized. 8. Offset Stability is the product's output deviation when subjected to 1000 cycles of Pulsed Pressure, Temperature Cycling with Bias Test.
MPXHZ6130A 2 Sensors Freescale Semiconductor
Pressure
Maximum Ratings
Table 2. Maximum Ratings(1)
Rating Maximum Pressure (P1 > P2) Storage Temperature Operating Temperature Output Source Current @ Full Scale Output(2) Output Sink Current @ Minimum Pressure Offset(2) Symbol Pmax Tstg TA I o+ Io Value 400 -40 to +125 -40 to +125 0.5 -0.5 Units kPa C C mAdc mAdc
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. 2. Maximum Output Current is controlled by effective impedance from VOUT to Gnd or VOUT to VS in the application circuit.
Figure 1 shows a block diagram of the internal circuitry integrated on a pressure sensor chip.
VS 2
Sensing Element
Thin Film Temperature Compensation and Gain Stage #1
Gain Stage #2 and Ground Reference Shift Circuitry
4
VOUT
GND
3
Pins 1, 5, 6, 7, and 8 are NO CONNECTS
Figure 1. Fully Integrated Pressure Sensor Schematic
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Pressure
On-chip Temperature Compensation and Calibration
Figure 4 shows the sensor output signal relative to pressure input. Typical minimum and maximum output curves are shown for operation over 0 to 85C temperature range. The output will saturate outside of the rated pressure range. A gel die coat isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The gel die coat and durable polymer package provide a media resistant barrier that allows the sensor to operate reliably in high humidity conditions as well as environments containing common automotive media. Contact the factory for more information regarding media compatibility in your specific application.
Fluoro Silicone Gel Die Coat Die Wire Bond Lead Frame P1
Stainless Steel Cap Thermoplastic Case
+5.0 V
VS Pin 2 100 nF MPXHZ6130A Vout Pin 4 GND Pin 3 47 pF 51 K to ADC
Absolute Element Sealed Vacuum Reference
Die Bond
Figure 2. Cross Sectional Diagram SSOP (not to scale)
Figure 3. Typical Application Circuit (Output Source Current Operation)
5.0 Transfer Function: 4.5 Vout =Vs x (0.007826 xP(kPa) - 0.07739) 4.0 +/- (PE x TM x Vs x 0.007826) Output (Volts) 3.5 PE = +/- 1.725kPa 3.0 TM = 1 @ 0 to 85C Vs = 5.0Vdc 2.5 2.0 1.5 1.0 0.5 60 0
MAX
MIN
TYP
100
110
120
130
Pressure (ref: to sealed vacuum) in kPa
Figure 4. Output vs. Absolute Pressure
MPXHZ6130A 4 Sensors Freescale Semiconductor
140
10
20
30
40
50
70
80
90
Pressure
Transfer Function (MPXHZ6130A)
Nominal Transfer Value: Vout = VS x (0.007826 x P(kPa) - 0.07739) (Pressure Error x Temp. factor x 0.007826 x VS) VS = 5.0 0.25 Vdc
Temperature Error Band
4.0 3.0 Temperature Error Factor 2.0 1.0 0.0 -40 -20 0 20
MPXHZ6130A Series
Break Points Temp - 40 0 to 85 125 Multiplier 3 1 1.75
40
60
80
100
120
140
Temperature in C NOTE: The Temperature Multiplier is a linear response from 0C to -40C and from 85C to 125C
Pressure Error Band
3.0 2.0 Pressure Error (kPa) 1.0 0.0 -1.0 -2.0 -3.0 Pressure 15 to 130 (kPa) Error (Max) 1.725 (kPa) 20 40 60 80 100 120 Pressure (in kPa) Error Limits for Pressure
MPXHZ6130A Sensors Freescale Semiconductor 5
Pressure
MINIMUM RECOMMENDED FOOTPRINT FOR SUPER SMALL PACKAGES
Surface mount board layout is a critical portion of the total design. The footprint for the semiconductor package must be the correct size to ensure proper solder connection interface between the board and the package. With the correct pad geometry, the packages will self-align when subjected to a
0.050 1.27 TYP 0.150 3.81
solder reflow process. It is always recommended to fabricate boards with a solder mask layer to avoid bridging and/or shorting between solder pads, especially on tight tolerances and/or tight layouts.
0.387 9.83
0.027 TYP 8X 0.69 0.053 TYP 8X 1.35 inch mm
Figure 5. SSOP Footprint (Case 1317 and 1317A)
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Pressure
PACKAGE DIMENSIONS
CASE 1317-04 ISSUE F SUPER SMALL OUTLINE PACKAGE
MPXHZ6130A Sensors Freescale Semiconductor 7
Pressure
PACKAGE DIMENSIONS
CASE 1317-04 ISSUE F SUPER SMALL OUTLINE PACKAGE
MPXHZ6130A 8 Sensors Freescale Semiconductor
Pressure
PACKAGE DIMENSIONS
CASE 1317A-04 ISSUE D SUPER SMALL OUTLINE PACKAGE
MPXHZ6130A Sensors Freescale Semiconductor 9
Pressure
PACKAGE DIMENSIONS
CASE 1317A-04 ISSUE D SUPER SMALL OUTLINE PACKAGE
MPXHZ6130A 10 Sensors Freescale Semiconductor
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Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Freescale Semiconductor reserves the right to make changes without further notice to any products herein. Freescale Semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale Semiconductor assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters that may be provided in Freescale Semiconductor data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals", must be validated for each customer application by customer's technical experts. Freescale Semiconductor does not convey any license under its patent rights nor the rights of others. Freescale Semiconductor products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Freescale Semiconductor product could create a situation where personal injury or death may occur. Should Buyer purchase or use Freescale Semiconductor products for any such unintended or unauthorized application, Buyer shall indemnify and hold Freescale Semiconductor and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Freescale Semiconductor was negligent regarding the design or manufacture of the part. Freescale and the Freescale logo are trademarks of Freescale Semiconductor, Inc., Reg. U.S. Pat. & Tm. Off. All other product or service names are the property of their respective owners. (c) Freescale Semiconductor, Inc. 2010. All rights reserved.
MPXHZ6130A Rev. 1 05/2010

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